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SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Fabrication and measurement of micromechanical bridge structures for mass change detection

✍ Scribed by Moczała, Magdalena M.; Sierakowski, Andrzej; Dobrowolski, Rafał; Grabiec, Piotr; Gotszalk, Teodor P.; Szczepanski, Pawel; Kisiel, Ryszard; Romaniuk, Ryszard S.

Book ID: 120890205
Publisher: SPIE
Year: 2013
Weight: 433 KB
Volume: 8902
Category: Article
DOI: 10.1117/12.2031053

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