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SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - A prototype femtosecond laser system for MEMS fabrication

✍ Scribed by Garasz, K.; Kocik, M.; Tański, M.; Barbucha, R.; Mizeraczyk, J.; Nejbauer, M.; Radzewicz, C.; Szczepanski, Pawel; Kisiel, Ryszard; Romaniuk, Ryszard S.

Book ID: 120802288
Publisher: SPIE
Year: 2013
Weight: 378 KB
Volume: 8902
Category: Article
DOI: 10.1117/12.2030552

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