𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems - Influence of flare and NA error on lithography

✍ Scribed by Wang, Xuxia; Liu, Lihui; Li, Yanqiu; Guo, Xuejia; Han, Chunying; Yang, Jianhong; Ye, Tianchun; Hu, Song; Li, Yanqiu; Luo, Xiangang; Bao, Xiaoyi

Book ID: 120217040
Publisher: SPIE
Year: 2012
Weight: 207 KB
Volume: 8418
Category: Article
DOI: 10.1117/12.978626

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems - Optical components damage parameters database system

✍ Tao, Yizheng; Li, Xinglan; Jin, Yuquan; Xie, Dongmei; Tang, Dingyong; Ye, Tianch 📂 Article 📅 2012 🏛 SPIE ⚖ 295 KB

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Fabrication and measurement of toric lens

✍ Liu, Xuan-min; Su, Ying; He, Hai-yan; Zhang, Yun-long; Guo, Rui; Zhang, Feng; Ya 📂 Article 📅 2012 🏛 SPIE ⚖ 209 KB

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Progresses in optical design and simulation optimization methods

✍ Liu, Hua; Ding, Quanxin; Zhou, Liwei; Yang, Li; Ruch, Eric; Li, Shengyi 📂 Article 📅 2012 🏛 SPIE ⚖ 139 KB

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Illuminator design for small field ArF lithography system

✍ Wei, Lidong; Li, Yanqiu; Liu, Ke; Liu, Xiaolin; Yang, Li; Ruch, Eric; Li, Shengy 📂 Article 📅 2012 🏛 SPIE ⚖ 514 KB

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Laser beam shaping and packaging system

✍ Luo, Daxin; Zhao, Baiqin; Yang, Li; Ruch, Eric; Li, Shengyi 📂 Article 📅 2012 🏛 SPIE ⚖ 387 KB

SPIE Proceedings [SPIE 6th International

SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Study on UVC ultraviolet filter film

✍ Kou, Yang; Fu, Xiu-hua; Liu, Dong-mei; Zhu, Hao; Tang, He-yue; Yang, Li; Ruch, E 📂 Article 📅 2012 🏛 SPIE ⚖ 305 KB