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SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems - Large aperture ratio machining of the Z-cut quartz base on MEMS technology

✍ Scribed by Xie, Haihe; Jiang, Xiaogfeng; Lin, Chun; Lu, Xizhao; Huang, Yuanqing; Ye, Tianchun; Hu, Song; Li, Yanqiu; Luo, Xiangang; Bao, Xiaoyi

Book ID: 120183752
Publisher: SPIE
Year: 2012
Weight: 466 KB
Volume: 8418
Category: Article
DOI: 10.1117/12.956754

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