SPIE Proceedings [SPIE 1988 Semiconductor Symposium - Newport Beach, CA (Monday 14 March 1988)] Spectroscopic Characterization Techniques for Semiconductor Technology III - Characterization of MeV iOn-Implanted GainAs/GaAs Using X-Ray And Raman Techniques

✍ Scribed by Wie, Chu R.; Xie, K.; Kim, H. M.; Chen, J. F.; Burns, G.; Dacol, F. H.; Pettit, G. D.; Woodall, J. M.; Glembocki, Orest J.; Pollak, Fred H.; Ponce, Fernando A.

• Book ID: 121005415
• Publisher: SPIE
• Year: 1988
• Weight: 479 KB
• Volume: 946
• Category: Article
• DOI: 10.1117/12.947425