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SPIE Proceedings [SPIE 16th International Workshop on Physics of Semiconductor Devices - Kanpur, India (Monday 19 December 2011)] 16th International Workshop on Physics of Semiconductor Devices - Design of piezoresistive MEMS absolute pressure sensor

✍ Scribed by Kumar, S.; Pant, B. D.; Katiyar, Monica; Mazhari, B.; Mohapatra, Y N.

Book ID: 120948441
Publisher: SPIE
Year: 2012
Weight: 395 KB
Volume: 8549
Category: Article
DOI: 10.1117/12.923644

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