Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

✍ Scribed by Y. Lu; E. Ramsay; C.R. Stockbridge; A. Yurt; F.H. Köklü; T.G. Bifano; M.S. Ünlü; B.B. Goldberg

• Book ID: 119326680
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 470 KB
• Volume: 52
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2012.06.026