✦ LIBER ✦
Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits
✍ Scribed by B.B. Goldberg; A. Yurt; Y. Lu; E. Ramsay; F.H. Köklü; J. Mertz; T.G. Bifano; M.S. Ünlü
- Book ID
- 113800562
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 403 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.