Speculations on a mechanism for the ion beam induced degradation of polyimide

✍ Scribed by J. Davenas; G. Boiteux; M. Fallavier

• Book ID: 113280287
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 356 KB
• Volume: 39
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90899-9