✦ LIBER ✦
The formation of volume elements for microelectromechanical systems in polyimide by method of reactive ion beam etching
✍ Scribed by A. I. Stognij; T. I. Orekhovskaya; Yu. V. Timoshkov; S. V. Koryakin
- Book ID
- 110126226
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2001
- Tongue
- English
- Weight
- 328 KB
- Volume
- 27
- Category
- Article
- ISSN
- 1063-7850
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