The silicon-rich oxide (SiO x ) films were deposited using the LPCVD (Low Pressure Chemical Vapour Deposition) method at the temperature of 570 °C and with silane and oxygen as the reactant gasses. The films were deposited on silicon (1 1 1) substrates. The flows of oxygen and silan in the horizonta
✦ LIBER ✦
Spectroscopic studies of Nd3+-doped silicon-rich silicon oxide films
✍ Scribed by D. Bréard; F. Gourbilleau; C. Dufour; R. Rizk; J.-L. Doualan; P. Camy
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 374 KB
- Volume
- 146
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
Surface characterization of thin silicon
✍
D. Ristić; V. Holý; M. Ivanda; M. Marciuš; M. Buljan; O. Gamulin; K. Furić; M. R
📂
Article
📅
2011
🏛
Elsevier Science
🌐
English
⚖ 685 KB
Photoluminescence of Er-doped silicon-ri
✍
Carlos Rozo; Luis F. Fonseca; Daniel Jaque; José García Solé
📂
Article
📅
2011
🏛
Elsevier
🌐
English
⚖ 183 KB
Comparative study of Si precipitation in
✍
Y. Lebour; P. Pellegrino; S. Hernández; A. Martínez; E. Jordana; J.-M. Fedeli; B
📂
Article
📅
2009
🏛
Elsevier Science
🌐
English
⚖ 645 KB
Sputtering configurations and the lumine
✍
Carlos Rozo; Luis F. Fonseca
📂
Article
📅
2010
🏛
Elsevier Science
🌐
English
⚖ 392 KB
Nd-and Er-doped silicon rich oxide (SRO) thin films were prepared by rf-sputtering. Different films were obtained by changing target configurations. Al and Al 2 O 3 targets were used to obtain along with silicon rich silicon oxide (SRSO) films, Al-modified SRSO films and silicon rich aluminosilicate
Photoluminescence and radiation effect o
✍
Fang Zhu; Zhisong Xiao; Lu Yan; Feng Zhang; Kun Zhong; Guoan Cheng
📂
Article
📅
2009
🏛
Elsevier Science
🌐
English
⚖ 429 KB
Infrared and resonance Raman spectroscop
✍
Pham V. Huong; D. Mencaraglia; P. Andro; J. Baixeras
📂
Article
📅
1984
🏛
Elsevier Science
🌐
English
⚖ 178 KB