Spectroscopic ellipsometry characterization of high-k dielectric HfO[sub 2] thin films and the high-temperature annealing effects on their optical properties

✍ Scribed by Cho, Yong Jai; Nguyen, N. V.; Richter, C. A.; Ehrstein, J. R.; Lee, Byoung Hun; Lee, Jack C.

• Book ID: 120236798
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 339 KB
• Volume: 80
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1448384