Evaluation of the effects of thermal annealing temperature and high-k dielectrics on amorphous InGaZnO thin films by using pseudo-MOS transistors

✍ Scribed by Se-Won Lee, Won-Ju Cho

• Book ID: 115076836
• Publisher: The Korean Physical Society
• Year: 2012
• Tongue: English
• Weight: 299 KB
• Volume: 60
• Category: Article
• ISSN: 0374-4884
• DOI: 10.3938/jkps.60.1317