Spectroscopic Ellipsometry and Reflectometry: A User's Guide
โ Scribed by Tompkins, McGahan
- Publisher
- John Wiley & Sons
- Year
- 1999
- Tongue
- English
- Leaves
- 237
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Synopsis
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
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