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Spectroscopic and kinetic ellipsometry studies of hot-wire deposited polycrystalline silicon on glass

✍ Scribed by P.A.T.T. van Veenendaal; Gerard W.M. van der Mark; J.K. Rath; R.E.I. Schropp

Book ID: 108388629
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 252 KB
Volume: 430
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)00135-4

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