XPS and IR analysis of thin barrier film
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M. Walker; K.-M. BaumgΓ€rtner; M. Ruckh; M. Kaiser; H. W. Schock; E. RΓ€uchle
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Article
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1997
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John Wiley and Sons
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English
β 182 KB
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Thin fluorocarbon polymer films are prepared on PE-foils in low-pressure electron cyclotron resonance plasmas using ethylene (C 2 H 4 ) and trifluoromethane (CHF 3 ) as monomers. The thin fluorinated hydrocarbon layers strongly reduces the permeability of polyethylene to alkanes. For example, the pe