Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

✍ Scribed by Ghim, Young-Sik ;Kim, Seung-Woo

• Book ID: 115354163
• Publisher: The Optical Society
• Year: 2009
• Tongue: English
• Weight: 456 KB
• Volume: 48
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.48.000799