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Spectral investigation of polymerization processes during the plasma etching of silicon films

✍ Scribed by M. N. Bosyakov; A. A. Zaikov; A. A. Labuda

Publisher: Springer US
Year: 1981
Tongue: English
Weight: 264 KB
Volume: 35
Category: Article
ISSN: 0021-9037
DOI: 10.1007/bf00624126

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