Specific features of solid-phase recrystallization of silicon-on-sapphire structures amorphized by oxygen ions

✍ Scribed by P. A. Aleksandrov; K. D. Demakov; S. G. Shemardov; Yu. Yu. Kuznetsov

• Book ID: 111444321
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 147 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609050108