Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011

✍ Scribed by Chien-Chung Fu, Bernd Michel

• Book ID: 120914888
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 92 KB
• Volume: 19
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-012-1731-6