Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009

✍ Scribed by Sven Achenbach; David Klymyshyn; Bernd Michel

• Book ID: 106185963
• Publisher: Springer-Verlag
• Year: 2010
• Tongue: English
• Weight: 124 KB
• Volume: 16
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-010-1103-z