Spatially resolved stress analysis using
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A. Atkinson; S. C. Jain
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Article
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1999
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John Wiley and Sons
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English
β 109 KB
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Raman spectroscopy using a laser microprobe (also called micro-Raman) is becoming more widely used to study stress distribution in solids, particularly in micro-electronic device structures, because of its potential for high spatial resolution. Typically the diameter of the focused laser beam is 1 Β΅