Spatially resolved optical spectroscopy of plasma etching systems : D. Field, A. J. Hydes and D. F. Klemperer. Vacuum34 (3–4), 347 (1984)

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 126 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90161-6