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Spatial resolution limit for the investigation of high-Tc films by low temperature scanning electron microscopy

✍ Scribed by Gross, R.; Hartmann, M.; Hipler, K.; Huebener, R.P.; Kober, F.; Koelle, D.


Book ID
114550122
Publisher
IEEE
Year
1989
Tongue
English
Weight
375 KB
Volume
25
Category
Article
ISSN
0018-9464

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Temperature stabilized sample stage for
✍ R Gross; J Bosch; H.-G Wener; J Fischer; R.P Huebener πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 491 KB

A cryogenic sample stage for scanning electron microscopes is described. The setup allows performance of measurements in the temperature range from 1.5 K to 300 K. During the measurements the sample can be irradiated directly by the electron beam. The sample temperature can be stabilized by a temper