Spatial profiles of metastable densities and electric field strengths in parallel-plate radio frequency discharges

✍ Scribed by Hebner, G.A.; Greenberg, K.E.

• Book ID: 117862738
• Publisher: IEEE
• Year: 1996
• Tongue: English
• Weight: 304 KB
• Volume: 24
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.491742