Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

✍ Scribed by Czarnetzki, U.; Hebner, G.A.; Luggenholscher, D.; Dobele, H.F.; Riley, M.E.

• Book ID: 114558669
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 666 KB
• Volume: 27
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.763042