Round-robin test for flatness measuremen
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Article
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1997
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Elsevier Science
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English
β 418 KB
Part II1: LTV and PLTV I Due to increasing market demands for GaAs substrates worldwide, improvements in physical characteristics such as warp, flatness, local thickness variation (LTV) and other parameters are required. III-Vs Review concludes its three-part series covering the round-robin testing