Some recent advances in silicon microtechnology and their dependence on processing technique

✍ Scribed by RE Hurley; HS Gamble

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 1019 KB
• Volume: 46
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(94)00061-1