Some recent advances in silicon microtechnology and their dependence on processing technique : R. E. Hurley and H. S. Gamble. Vacuum, 46, 3, 287 (1995)

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 227 KB
• Volume: 36
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(96)81962-7