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Some properties of laser annealed shallow As+ implanted silicon

✍ Scribed by P.J. Scanlon; K.M. Barfoot; P. Skensved; J.L. Whitton; I.D. Calder; F.R. Shepherd

Book ID: 113277284
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 473 KB
Volume: 7-8
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(85)90578-6

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