Some properties of amorphous carbon films deposited on the grounded electrode of a RF-PECVD reactor from Ar–CH4 mixtures

✍ Scribed by Namita Dutta Gupta; C. Longeaud; P. Chaudhuri; A. Bhaduri; S. Vignoli

• Book ID: 116668914
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 163 KB
• Volume: 352
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2005.10.042