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The effect of the CH4 level on the morphology, microstructure, phase purity and electrochemical properties of carbon films deposited by microwave-assisted CVD from Ar-rich source gas mixtures

✍ Scribed by Show, Yoshiyuki; Swope, Vernon M.; Swain, Greg M.


Book ID
122859802
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
901 KB
Volume
18
Category
Article
ISSN
0925-9635

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