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Some observations on the controlled oxidation of silicon

✍ Scribed by B.A. Joyce; J.H. Neave; M.R. Boudry

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 51 KB
Volume: 10
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(71)90107-7

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