Some chemical aspects of the fluorocarbon plasma etching of silicon and its compounds : J. W. Coburn and Eric Kay. Solid St. Technol. p. 117 (April 1979)

• Book ID: 103280086
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 124 KB
• Volume: 19
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(79)90478-5