l)(/ferent tectmolo~ies allow one to obtain batteo' materials in the Jorm of thin fihns. Physical method.s, i.e. evaporation or sputtering, and ctwmic'al methods, i.e. chemical vapour deposition, are mainly used. Thin/ihTt microbatleries have been studied/or 30 years. 7he fitwt reason for the use oJ'thin films in battery technologq' was the low ionic conductiviO' of the solid electro&w use& reducing its thickness provided a relatively low inlernal resistance to lhe cells. Aj'ter this ,firs't st W concerning mainb' the eh'ctro&te, thin fihn technologws were applied to all the batte O, elements. Following the miniaturization (~t" electronic devices, dfin film solid state batteries at'{" ~vceiving some new attentiotl, motivated by the desire Jor a battery that can be.hdly integrated with microcircuits. Lithium microbatteries have been the most studied," while some of them are the replica of "classical'" batteries using a #quid electrolyte, e.g. the Li/TiS e O.'stem, others use new materials. Very inwresting results have been obtained.
Because ~)1" the very high conductivity of silver conducting electrolyws, silver microbatteries have also been extensively studied attd sign(ficant results obtained with a primary cell design.
Other systems using jluoride or cot)per as ionic conductor have also been considered; they are characterized by a low a~vilable voltage.