Development and performance of a rechargeable thin-film solid-state microbattery
β Scribed by Steven D. Jones; James R. Akridge
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 403 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0378-7753
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Thin films of LiMn204 spinel were fabricated by r.f. magnetron sputtering. The fresh films were amorphous but could be crystallized into a spinel structure by rapid thermal annealing in an oxygen ambient. The electrochemical performance of LiMn204 thin-film cathode was tested in LiMn204 thin-film (2
Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r