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Solid-phase epitaxial growth of CoSi2 on clean and oxygen-adsorbed Si(001) surfaces

✍ Scribed by Yukihiro Hayashi; Motoki Yoshinaga; Hiroya Ikeda; Shigeaki Zaima; Yukio Yasuda

Book ID: 117219731
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 382 KB
Volume: 438
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(99)00559-2

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