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Solid Concepts moves into metal AM


Book ID
123319261
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
979 KB
Volume
68
Category
Article
ISSN
0026-0657

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KLA-Tencor Corp has moves into metal met
๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 491 KB

KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.