ZnO thin films on Si(1 1 1) gr
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Jie Zhao; Lizhong Hu; Zhaoyang Wang; Jie Sun; Zhijun Wang
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Article
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2006
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Elsevier Science
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English
⚖ 400 KB
ZnO thin films with highly c-axis orientation have been fabricated on p-type Si(1 1 1) substrates at 400 8C by pulsed laser deposition (PLD) from a metallic Zn target with oxygen pressures between 0.1 and 0.7 mbar. Experimental results indicate that the films deposited at 0.3 and 0.5 mbar have bette