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Sol–gel derived TiO2:ZrO2 multilayer thin films for humidity sensing application

✍ Scribed by Kuyyadi P. Biju; Mahaveer K. Jain

Book ID
108263843
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
817 KB
Volume
128
Category
Article
ISSN
0925-4005

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Structural and electrical characteristics of ZrO2–TiO2 thin films by sol–gel method
✍ Cheng-Hsing Hsu; Ching-Fang Tseng; Chun-Hung Lai; Hsin-Han Tung; Shih-Yao Lin 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 558 KB

In this paper, we investigated electrical properties and microstructures of ZrTiO 4 (ZrO 2 -TiO 2 ) thin films prepared by the sol-gel method on ITO substrates at different annealing temperatures. All films exhibited ZrTiO 4 (1 1 1) and (1 0 1) orientations perpendicular to the substrate surface, an