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Sol-Gel Preparation of Pb(Zr0.50Ti0.50)O3 Ferroelectric Thin Films Using Zirconium Oxynitrate as the Zirconium Source

✍ Scribed by Jianming Zeng; Shigeng Song; Lianwei Wang; Miao Zhang; Lirong Zheng; Chenglu Lin

Book ID: 109255743
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 285 KB
Volume: 82
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1551-2916.1999.tb20087.x

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## Lead zirconate titanate (PZT) Inorganic zirconium precursor Texture a b s t r a c t Highly (1 0 0)-textured Pb(Zr 0.52 Ti 0.48 )O 3 films have been prepared on platinized silicon substrate by a modified sol-gel technique using inorganic zirconium precursor. The X-ray diffraction analysis on the