Highly (1 0 0)-textured Pb(Zr0.52Ti0.48)O3 film derived from a modified sol–gel technique using inorganic zirconium precursor

✍ Scribed by F. Yang; W.D. Fei; Q. Sun

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 681 KB
• Volume: 209
• Category: Article
• ISSN: 0924-0136
• DOI: 10.1016/j.jmatprotec.2008.01.042

✦ Synopsis

Lead zirconate titanate (PZT)

Inorganic zirconium precursor Texture a b s t r a c t Highly (1 0 0)-textured Pb(Zr 0.52 Ti 0.48 )O 3 films have been prepared on platinized silicon substrate by a modified sol-gel technique using inorganic zirconium precursor. The X-ray diffraction analysis on the crystallinity and texture evolution of sol-gel lead zirconate titanate (PZT) films revealed that the films were well crystallized to perovskite phase when annealed at 550 • C, and that highly (1 0 0) preferred orientation dominated in the PZT films after annealed at 650 • C. The (1 0 0)-oriented PZT film exhibited the remnant polarization of 26.3 C/cm 2 and the coercive field of 100 kV/cm.