Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants
β Scribed by S. Seraji; Y. Wu; M. Forbess; S. J. Limmer; T. Chou; G. Z. Cao
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 244 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0935-9648
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