β Scribed by N.N. Kundu; S.N. Gupta
No coin nor oath required. For personal study only.
Mask making is a very important part of integrated circuit fabrication. There has been a general trend towards a higher degree of automation in mask making. With the advent of VLSI, there is a need for facilities which can perform more complex jobs and' need a minimum of user intervention. For many environments, it is important that the mask making facility be very flexible so that it can cater for a variety of jobs with a minimum of effort. In this paper we report a computer program which was developed to simulate several requirements of a mask making facility. It is also expected to lead to a more automated mask making shop.
π SIMILAR VOLUMES
Computerisation of unit processes in the fabrication of integrated circuits has been taking place at a rapid pace since the complexity of these circuits has been going up considerably. One aspect of this computerisation has been the creation of data bases for unit processes. This data base concept h