A simple expert system for a mask shop

✍ Scribed by S.N. Gupta; K.I. Arshak

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 262 KB
• Volume: 18
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(87)80372-5

✦ Synopsis

Computerisation of unit processes in the fabrication of integrated circuits has been taking place at a rapid pace since the complexity of these circuits has been going up considerably. One aspect of this computerisation has been the creation of data bases for unit processes. This data base concept has to be extended to knowledge bases leading to expert systems for these processes. There has been some effort in this direction in some of the important processes. In this paper we report a simple expert system for the mask making process which is based on an optical pattern generator. This approach is shown to make it very convenient to modify the existing knowledge base with refinement of the mask making process.