A simple expert system for a mask shop
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S.N. Gupta; K.I. Arshak
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Article
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1987
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Elsevier Science
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English
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Computerisation of unit processes in the fabrication of integrated circuits has been taking place at a rapid pace since the complexity of these circuits has been going up considerably. One aspect of this computerisation has been the creation of data bases for unit processes. This data base concept h