Soft magnetic multilayer films with wide frequency band losses and high resistivity

✍ Scribed by Ma, Qiang

• Book ID: 105366327
• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 477 KB
• Volume: 208
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201026706

✦ Synopsis

Abstract

A series of CoFeB/MgO multilayers was fabricated by means of DC/RF magnetron sputtering. It is observed that the electromagnetic properties of the multilayers of CoFeB/MgO are closely related with the thickness of CoFeB sublayers, and the soft magnetic properties of discontinuous multilayers are affected by the cycle number of CoFeB/MgO bilayers. The optimized film of [Co~64~Fe~24~B~12~(0.7 nm)/MgO(0.4 nm)]~50~ exhibits a magnetic loss µ″ larger than 100 and µ′ larger than 80 between 0.9 and 2.1 GHz. The electrical resistivity ρ of this film is as high as 3.75 × 10^3^ µΩ cm. The results indicate that this discontinuous CoFeB/MgO multilayer film has potential to serve as a noise suppressor or EMC materials in the GHz frequency range.