✦ LIBER ✦

Socketed ball bar

Book ID: 103529904
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 346 KB
Volume: 8
Category: Article
ISSN: 0141-6359
DOI: 10.1016/0141-6359(86)90026-7

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This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a contin