Ball-and-socket joint with leakage sensor

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 127 KB
• Volume: 2007
• Category: Article
• ISSN: 1350-4789
• DOI: 10.1016/s1350-4789(07)70154-x

✦ Synopsis

This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a continuous ring barrier that must be installed when the assembly is manufactured. Neither the bonded rubber seal, nor the barrier shield ring may be readily replaced in the