Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies

✍ Scribed by Susan Walter, Thomas Herzog, Henning Heuer, Hagen Bartzsch, Daniel Gloess

• Book ID: 113047155
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 522 KB
• Volume: 18
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-012-1478-0